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Precision Motion Control Platform
Flat Z-Axis Lifting Platform
Product Description
- This vertical Z-axis motion platform provides nanometer-level positioning accuracy and features linear motor drive and cross-roller guides, delivering excellent dynamic performance and positioning accuracy. It offers 1 nm resolution, repeatable positioning accuracy of ±100 nm, and positioning accuracy of ±200 nm, along with other high-precision performance features. The high-precision direct-drive lifting table features high dynamic performance with a no-load cutoff frequency of over 120 Hz, a low-profile design suitable for space-constrained applications, and an integrated pneumatic counterbalance. With a maximum load capacity of 15 kg, it can be combined with Surface-Theta or linear axes to form a multi-axis system. Additional structural features include 5 nm in-situ stability. It is suitable for applications such as lithography, inspection and packaging, profile measurement, gene sequencing in the biomedical field, and other semiconductor industry applications.
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