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Precision Motion Control Platform
Air-Floating Single-Axis Platform
Product Description
- Featuring a high-performance direct-drive air-floating platform with excellent dynamic performance, air-surround-type preload, and a non-contact design, it can be customized for high-performance scanning and inspection applications. The air-floating platform provides nanometer-level positioning accuracy, and the linear motor drive can be used as a single axis or combined with other axes to form a multi-axis system, making it highly suitable for heavy-load applications and other demanding applications. With zero friction between the slide platform and guide, it delivers excellent dynamic performance and positioning accuracy. The air-floating platform features a positive- and negative-pressure design and uses pneumatic elastic potential energy as a supporting guide mechanism to accommodate uneven gravity distribution along the air-floating guide rail, helping maintain a consistent air gap and ensuring stable operation of the air guide rail. It is suitable for applications such as large-scale optical lens inspection, wafer defect detection in the semiconductor industry, precision manufacturing, packaging, and other high-precision industrial applications.
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