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Precision Motion Control Platform
IC Carrier Board LDI Exposure Air-Floating Platform
Product Description
- The multi-axis air-floating platform adopts an air-floating XY nested structure, beam-side K-axis and Z-axis assemblies with mechanical guide rails, and direct-drive control using core linear motors. With a cogging-free design, it enables smooth operation even at low speeds with minimal speed variation, while delivering excellent dynamic performance, positioning accuracy, and repeatability. Equipped with non-contact, high-precision linear scales, the multi-axis air-floating platform provides high-precision position feedback, full-stroke repeatability of less than 0.5 μm, positioning accuracy of less than 1 μm, and other high-precision structural features. It is primarily used in semiconductor production lines, microelectronics manufacturing, LCD displays, PCB products, and other industrial applications requiring high precision and high efficiency.
Product Detail Information
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