Products
We provide a diverse product lineup for high-precision inspection and automation. Discover solutions optimized for your various production environments.
Precision Motion Control Platform
Self-Balancing Z-Direction Motion Table
Product Description
- Featuring nanometer-level positioning accuracy, a linear motor drive with cross-roller guides, excellent dynamic performance and positioning accuracy, a no-load cutoff frequency of over 100 Hz, 1 nm resolution, repeatable positioning accuracy of ±100 nm, and positioning accuracy of ±250 nm. The dual-cylinder counterbalance design provides high dynamic performance with a cutoff frequency exceeding 100 Hz. Additional structural features include cross-roller guides, flexible configuration options with customizable travel lengths, and 3 nm in-situ stability. The platform is suitable for applications such as fiber-optic coupling in the telecommunications industry, crystal defect detection in the semiconductor industry, gene sequencing in the biomedical field, and laser micro- and nano-machining.
Product Detail Information
Model Naming
Specifications
Drawings