Products
We provide a diverse product lineup for high-precision inspection and automation. Discover solutions optimized for your various production environments.
Precision Motion Control Platform
H-Shaped Planar Air-Floating Platform
Product Description
- Featuring high dynamic performance, smooth motion without friction or vibration, a 1 nm linear scale resolution, and a low coefficient of thermal expansion. The dual-drive beams feature an H-bridge structure with air guides, an integrated XY design, and a low Abbe offset, providing excellent structural stability and precision. It is suitable for wafer inspection applications across a wide range of wafer sizes and processes.
Product Detail Information
Model Naming
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