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Precision Motion Control Platform
Nested Air-Floating Platform
Product Description
- The high-performance direct-drive air-floating platform features excellent dynamic performance, air-surround-type preload, and a non-contact design. It can be customized for high-performance scanning and inspection applications and provides nanometer-level positioning accuracy. The linear motor drive can be used as a single axis or combined with other axes to form a multi-axis system, making it highly suitable for heavy-load applications and other demanding applications. With zero friction between the slide platform and guide, the platform delivers excellent dynamic performance and positioning accuracy. Its positive- and negative-pressure air-floating design uses pneumatic elastic potential energy as a supporting guide mechanism to accommodate uneven gravity distribution along the air-floating guide rail, helping maintain a consistent air gap and ensuring stable operation of the air guide rail. It is suitable for applications such as large-scale optical lens inspection, wafer defect detection in the semiconductor industry, precision manufacturing, packaging, and other high-precision industrial applications.
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